Pressure sensor

摘要

To improve the characteristics of a portion which can be represented by an approximate first-order line (so-called linearity) in the relation between pressure and diaphragm displacement. To equalize the pressure-applying area/volume of a diaphragm when plural ring-shaped reinforcement ribs are in contact with said cover (no load condition when no pressure is applied to the diaphragm) and the pressure-applying area/volume of a diaphragm when said diaphragm is apart from said cover (the diaphragm is displaced due to pressure load).