发明名称 |
Apparatus for semiconductor device and method using the same |
摘要 |
An apparatus for a semiconductor device includes: a chamber; a susceptor in the chamber; a plurality of heating-blocks on the susceptor; a lift pin assembly through the susceptor; a substrate holder over the susceptor, the substrate holder having a plurality of through holes corresponding to the plurality of heating-blocks; and a shaft combined with the substrate holder-through the susceptor.
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申请公布号 |
US2005000453(A1) |
申请公布日期 |
2005.01.06 |
申请号 |
US20040860534 |
申请日期 |
2004.06.02 |
申请人 |
HWANG CHUL-JU;LEE SANG-GON |
发明人 |
HWANG CHUL-JU;LEE SANG-GON |
分类号 |
H01L21/68;H01L21/00;H01L21/687;(IPC1-7):C23C16/00 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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