OPTICAL SWITCH FOR REDUCING POWER CONSUMPTION AND INCREASING RESPONSE SPEED BY USING MEMS STRUCTURE AND WAVEGUIDE STRUCTURE AND FABRICATING METHOD THEREOF

摘要

PURPOSE: An optical switch and a fabricating method thereof are provided to reduce the power consumption and reduce response speed by forming an input/output part with a waveguide and forming a switching part with a structure for changing a moving waveguide. CONSTITUTION: An input waveguide(32) is connected to an optical fiber of an input side for receiving an optical signal. A plurality of output waveguides(34) are connected to optical fibers of an outside for outputting optical signals. An actuator(37) having a MEMS structure is installed among the input waveguide and the output waveguides. The actuator is formed with a fixing part and a moving part connected to the fixing part by a spring. A plurality of moving waveguides(35) are formed on the moving part of the actuator. Output terminals of the moving waveguides are opposite to the waveguides of the output side when the moving part moves along the displacement direction and one end of the moving part meets the input waveguide.