| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve treatment efficiency in a plasma treatment device in which a processed object is passed between a first electrode and a second electrode. <P>SOLUTION: The first electrode 11 of the plasma treatment device M1 is constituted of a plurality of partial electrodes 11S, and these partial electrodes 11S are arranged in a row so as to be along a feed direction to the processed object W. Between the adjacent partial electrodes 11S and on the outsides of the adjacent partial electrodes 11S of both ends in an arrangement direction of the partial electrodes 11S, a blow means 31 of a treatment gas to a plasma treatment space 1a and a suction means 51 of the gas from the plasma treatment space are alternately arranged so as to be along the row direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
