| 摘要 |
PROBLEM TO BE SOLVED: To enable to carry out observation in an excellent detecting state, in case of the observation of a sample by a retarding method using a detector with a microchannel plate. SOLUTION: In the observation device provided with an electron gun; an objective lens for focusing electron beams generated from the electron gun and irradiating them on the sample; and a detector arranged between the objective lens and the sample and equipped with a channel plate having an input part set at a sample side and an output part set at an objective lens side, and a detecting electrode set at a rear-step side of the channel plate; a first negative potential is impressed on the sample, and a second negative potential is impressed on the input part of the channel plate in the detector, and at the same time, a grounding potential is impressed on the detecting electrode. COPYRIGHT: (C)2005,JPO&NCIPI
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