发明名称 |
Cleaning system, device and method |
摘要 |
The cleaning device may clean probe elements. The probe elements may be the probe elements of a probe card testing apparatus for testing semiconductor wafers or semiconductor dies on a semiconductor wafer or the probe elements of a handling/testing apparatus for testing the leads of a packaged integrated circuit. During the cleaning of the probe elements, the probe card or the handler/tester is cleaned during the normal operation of the testing machine without removing the probe card from the prober. The cleaning device has a working surface with a particular characteristic (a matte finish or a conductive material) so that a prober is capable of automatically determining the location of the working surface of the cleaning device and therefore operate in an automatic cleaning mode.
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申请公布号 |
US2005001645(A1) |
申请公布日期 |
2005.01.06 |
申请号 |
US20040825718 |
申请日期 |
2004.04.16 |
申请人 |
HUMPHREY ALAN E.;BROZ JERRY;ADAMS BILLIE J. |
发明人 |
HUMPHREY ALAN E.;BROZ JERRY;ADAMS BILLIE J. |
分类号 |
B08B1/00;G01R31/02;G01R31/28;(IPC1-7):G01R31/02 |
主分类号 |
B08B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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