发明名称 TWO-DIMENSIONAL LIGHT-MODULATING NANO/MICRO APERTURE ARRAY AND HIGH-SPEED NANO PATTERN RECORDING SYSTEM UTILIZED WITH THE ARRAY
摘要 A two-dimensional light-modulating fine aperture array apparatus includes a spatial light-modulating unit for adjusting quantity of incident light by using a plurality of light amount adjusting cells (liquid crystal cells or micromirrors) arrayed in matrix form, a two-dimensional microlens array having microlenses which focus light beams passing through the light quantity adjusting cells, and a highly efficient two-dimensional fine aperture array. The light is emitted through the fine apertures by connecting the two-dimensional light-modulating fine aperture array apparatus with a light source unit. A scanning unit moves in the x and y directions to perform a scanning process on a surface of a recording medium by using the light emitted from the apertures.
申请公布号 WO2005001914(A1) 申请公布日期 2005.01.06
申请号 WO2003KR01387 申请日期 2003.07.14
申请人 HAHN, JAE WON 发明人 HAHN, JAE WON
分类号 H01L21/027;G03B27/54;G03F7/20 主分类号 H01L21/027
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