发明名称 PULSE DRIVE OF RESONANT MEMS DEVICES
摘要 System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.
申请公布号 WO2005001903(A2) 申请公布日期 2005.01.06
申请号 WO2004US19637 申请日期 2004.06.16
申请人 TEXAS INSTRUMENTS INCORPORATED;TURNER, ARTHUR, M.;DEWA, ANDREW, S.;HEATON, MARK, W.;RODEN, PHILIP, A.;SIMPSON, CARTER, B. 发明人 TURNER, ARTHUR, M.;DEWA, ANDREW, S.;HEATON, MARK, W.;RODEN, PHILIP, A.;SIMPSON, CARTER, B.
分类号 G02B26/08;H02K33/16;H02P25/02 主分类号 G02B26/08
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