| 发明名称 |
MICROMACHINED DEVICE WITH ENHANCED DIMENSIONAL CONTROL |
| 摘要 |
<p>A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures.</p> |
| 申请公布号 |
EP0886781(B1) |
申请公布日期 |
2005.01.05 |
| 申请号 |
EP19970909047 |
申请日期 |
1997.03.14 |
| 申请人 |
ANALOG DEVICES, INC. |
发明人 |
SAMUELS, HOWARD, R.;FARASH, JEFFREY, A. |
| 分类号 |
B81B3/00;G01P15/08;G01P15/125;(IPC1-7):G01P15/08;G01P15/13 |
主分类号 |
B81B3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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