发明名称 ALKALI-DEVELOPABLE NEGATIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION EXCELLENT IN ADHESIVE FORCE OF THIN LINES AND RESOLUTION
摘要 PURPOSE: An alkali-developable negative type photosensitive resin composition is provided, which is excellent in an adhesive force of thin lines and a resolution, therefore can provide a dry film photoresist capable of forming high resolution pattern. CONSTITUTION: The photosensitive resin composition contains an alkali-soluble binder polymer, a photopolymerizable monomer, a photopolymerization initiator, and additives. The photopolymerizable monomer is a compound(formula 1) having a methacrylate group as a molecular terminal and 5-10 -OH groups on its middle chain, wherein the content of the compound(formula 1) is 10-15wt% based on the total resin composition. In the formula, R is H or CH3 and m is an integer of 5-10.
申请公布号 KR20050000464(A) 申请公布日期 2005.01.05
申请号 KR20030040973 申请日期 2003.06.24
申请人 KOLON INDUSTRIES, INC. 发明人 CHOI, JUN HYEAK;HAN, KOOK HYEON;KIM, JEONG KUN
分类号 G03F7/027;(IPC1-7):G03F7/027 主分类号 G03F7/027
代理机构 代理人
主权项
地址