Providing an organic vertical cavity laser array device with etched region in dielectric stack

摘要

A method of making an organic vertical cavity laser array device includes providing a substrate and a first portion of a bottom dielectric stack reflective to light over a predetermined range of wavelengths and being disposed over the substrate; forming an etched region in the top surface of the first portion of the bottom dielectric stack to define an array of spaced laser pixels which have higher reflectance than the interpixel regions so that the array emits laser light; and forming a second portion of the bottom dielectric stack over the etched first portion. The method also includes forming an active region over the second portion of the bottom dielectric stack for producing laser light, and forming a top dielectric stack over the active region and spaced from the bottom dielectric stack and reflective to light over a predetermined range of wavelengths.