Separating layer system with individual layer(s) of defined material by pulse-magnetron sputtering involves applying individual layer(s) as sub-regions lying one on the other in growth direction

摘要

The method involves applying at least one individual layer (2) as sub-regions (2a-2c) lying one on the other in the growth direction so that the separation of such stacked sub-regions of the layer takes place with a different pulse mode and/or a different pulse ratio and/or a different number of individual pulses per pulse packet and/or different pulse duration. An independent claim is also included for the following: (1) a product consisting of a base body and a layer system applied in accordance with the inventive method.