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发明名称
HALBLEITER VERARBEITUNGVERFAHREN MIT DER HERSTELLUNG VON EINER SPERRSCHICHT
摘要
申请公布号
DE69827974(D1)
申请公布日期
2005.01.05
申请号
DE1998627974
申请日期
1998.12.18
申请人
MICRON TECHNOLOGY, INC.
发明人
PAREKH, R.;THAKUR, P.
分类号
H01L21/283;H01L21/02;H01L21/768;H01L21/8242;H01L23/522;H01L27/108;(IPC1-7):H01L21/320
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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