| 摘要 |
A micro-mirror comprises a membrane of a dielectric polymer layer between two metal layers for supplying a high frequency ac voltage thereto for dielectric heating of the membrane, and a further polymer layer adjacent to and forming a bimorph with the second metal layer, the membrane being supported around its periphery so that the membrane produces a mirror with a curvature, and hence a focal length, dependent upon the heating. Such micro-mirrors are useful in optical signal paths in optical components, including optical receivers and variable attenuators. A detected optical signal can be used in a feedback control path to control a high frequency ac voltage source connected to the two metal layers, and hence the focal length of the micro-mirror. <IMAGE> |
