| 摘要 |
PURPOSE: An atmospheric plasma generator and a plasma process system using the same are provided to perform possibly a large-area plasma process by stably, uniformly, and continuously high-density plasma and connecting a plurality of plasma chambers in parallel to each other. CONSTITUTION: A plasma chamber(20) includes an external electrode tube having an open region for injecting a plasma gas, an internal electrode tube installed into an inner side of the external electrode tube, a couple of dielectric layers installed between the external electrode tube and the internal electrode tube, and a spacer installed at both ends of the external electrode tube and the internal electrode tube. A ferrite core is installed at the plasma chamber. An induction coil(32) is wound around the ferrite core. A first power supply(36) is electrically connected to the external electrode tube and the internal electrode tube. A second power supply(34) is electrically connected to the induction coil. A gas supply tube is used for supplying the plasma chamber.
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