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发明名称
Insulators for high density circuits
摘要
申请公布号
US6838764(B2)
申请公布日期
2005.01.04
申请号
US20020179110
申请日期
2002.06.24
申请人
MICRON TECHNOLOGY INC
发明人
FARRAR PAUL A
分类号
H01L21/3105;H01L21/312;H01L21/321;H01L21/768;H01L23/532;H05K1/02;H05K1/03;(IPC1-7):H01L23/053
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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PROJECTOR
