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发明名称
Process for fabricating a mask
摘要
申请公布号
US6838213(B2)
申请公布日期
2005.01.04
申请号
US20020200233
申请日期
2002.07.23
申请人
AGERE SYSTEMS INC
发明人
KASICA RICHARD J;NOVEMBRE ANTHONY
分类号
G03F1/14;(IPC1-7):G03F9/00
主分类号
G03F1/14
代理机构
代理人
主权项
地址
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