发明名称 |
Probe card assembly |
摘要 |
In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.
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申请公布号 |
US6838893(B2) |
申请公布日期 |
2005.01.04 |
申请号 |
US20030458875 |
申请日期 |
2003.06.10 |
申请人 |
FORMFACTOR, INC. |
发明人 |
KHANDROS, JR. IGOR Y.;SPORCK, JR. A. NICHOLAS;ELDRIDGE, JR. BENJAMIN N. |
分类号 |
B23K1/00;B23K20/00;C23C18/16;C25D5/08;C25D5/22;C25D7/12;C25D21/02;G01R1/04;G01R1/067;G01R1/073;G01R31/28;H01L21/00;H01L21/48;H01L21/56;H01L21/60;H01L21/603;H01L21/66;H01L23/48;H01L23/485;H01L23/49;H01L23/498;H01L25/065;H01L25/16;H05K1/14;H05K3/20;H05K3/30;H05K3/32;H05K3/34;H05K3/36;H05K3/40;H05K7/10;(IPC1-7):G01R31/02 |
主分类号 |
B23K1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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