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发明名称
Black reflector plate
摘要
申请公布号
US6839507(B2)
申请公布日期
2005.01.04
申请号
US20020267053
申请日期
2002.10.07
申请人
APPLIED MATERIALS INC
发明人
ADAMS BRUCE;HUNTER AARON
分类号
H01L21/00;(IPC1-7):A21B2/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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