| 发明名称 |
Method for simultaneous formation of fuse and capacitor plate and resulting structure |
| 摘要 |
An improved method for forming a fuse element is disclosed. During the formation of the upper capacitor plate in a capacitor structure, metals or their alloys are simultaneously patterned as an upper capacitor plate and as a fuse.
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| 申请公布号 |
US6838367(B1) |
申请公布日期 |
2005.01.04 |
| 申请号 |
US20000644700 |
申请日期 |
2000.08.24 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
RHODES HOWARD E. |
| 分类号 |
H01L21/02;H01L23/525;H01L23/532;(IPC1-7):H01L21/44;H01L21/336;H01L29/00 |
主分类号 |
H01L21/02 |
| 代理机构 |
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| 主权项 |
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