发明名称 Film production method and film-element production method
摘要 A method for producing a lead ferroelectric film having high relative dielectric constant and low dielectric loss by a hydrothermal process is disclosed. The method includes the step of hydrothermally forming a ferroelectric layer on a substrate, followed by the step of hydrothermally treating the resulting film in an aqueous solution having a pH of about 5 to 7.
申请公布号 US6838117(B2) 申请公布日期 2005.01.04
申请号 US20030346074 申请日期 2003.01.17
申请人 MURATA MANUFACTURING CO., LTD. 发明人 KAWAMOTO MITSUTOSHI
分类号 C01G23/00;C23C18/12;H01L21/316;H01L41/24;(IPC1-7):B05D5/12;B05D1/36;B05D3/10 主分类号 C01G23/00
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