发明名称 |
Film production method and film-element production method |
摘要 |
A method for producing a lead ferroelectric film having high relative dielectric constant and low dielectric loss by a hydrothermal process is disclosed. The method includes the step of hydrothermally forming a ferroelectric layer on a substrate, followed by the step of hydrothermally treating the resulting film in an aqueous solution having a pH of about 5 to 7.
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申请公布号 |
US6838117(B2) |
申请公布日期 |
2005.01.04 |
申请号 |
US20030346074 |
申请日期 |
2003.01.17 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
KAWAMOTO MITSUTOSHI |
分类号 |
C01G23/00;C23C18/12;H01L21/316;H01L41/24;(IPC1-7):B05D5/12;B05D1/36;B05D3/10 |
主分类号 |
C01G23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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