SEMICONDUCTOR EQUIPMENT WITH WAFER DETECTING PART FOR CHECKING DEGREE OF LEANING IN WAFER

摘要

PURPOSE: A bit of semiconductor equipment is provided to restrain additional damage of a wafer by checking the degree of leaning in the wafer using a wafer detecting part. CONSTITUTION: A bit of semiconductor equipment includes a wafer chuck, a plurality of lift pins, a transfer part, and at least one wafer detecting part. The wafer chuck(105) is installed in a chamber. The plurality of lift pins(110) are arrange in the chuck. The transfer part is used for loading/unloading a wafer to/from the chuck. The wafer detecting part(120) is installed in the chamber in order to detect a leveling state of the wafer.