Table positioning device, comprises supports with displacement devices for moving table in direction parallel to table surface

摘要

Each support (2-4) for the table (1) has a displacement device for moving the table in a direction substantially parallel to the table surface. The supports are arranged in an equilateral triangle configuration and connected to the table via elastic and/or magnetic bearings. The displacement devices are ones which can be moved by magnetism (especially coils and/or linear motors) or ceramic parts which can change shape in response to electric and/or magnetic stimuli. The device comprises three supports providing three non-aligned support points (7-9) for the table. Each support has a displacement device for altering its dimension in the direction perpendicular to the table.