| 摘要 |
PURPOSE: A method for manufacturing a micro machine is provided to improve output precision of the micro machine by fabricating a capacitor with a high precision and superior electrical characteristics. CONSTITUTION: A method for manufacturing a micro machine includes the steps of forming a first electrode on a surface of a stopper layer(14) of a substrate(10) and forming an insulation layer on the substrate(10). The thickness of the insulation layer is larger than the thickness of the first electrode including the stopper layer(14) so that the first electrode is covered with the insulation layer. Then, the insulation layer is polished such that the stopper layer is exposed. After forming an opening in the stopper layer(14), the opening is filled with a sacrificial layer. A second electrode is formed on the insulation layer by passing through the sacrificial layer.
|
