| 摘要 |
<p>A POLISHING COMPOSITION AN ABRASIVE AND WATER , WHEREIN THE ABRASIVE HAS A PARTICLE SIZE DISTRIBUTION SUCH THAT (1) A RATIO OF D90 TO D50 (D90/D50) IS FROM 1.3 TO 3.0 , AND (2) D50 IS FROM 10 TO 600 NM , WHEREIN D90 IS DEFINED AS A PARTICLE SIZE AT 90OUNTED FROM A SMALLER SIZE ON A NUMBER BASE IN A CUMULATIVE PARTICLE SIZE DISTRIBUTION , AND WHEREIN D50 IS DEFINED AS A PARTICLE SIZE AT 50OUNTED FROM A SMALLER SIZE SIDE ON A NUMBER BASE IN A CUMULATIVE PARTICLE SIZE DISTRIBUTION .</p> |
