ICP ANTENNA AND PLASMA GENERATING APPARATUS USING THE SAME GENERATING UNIFORM HIGH-DENSITY PLASMA

摘要

PURPOSE: An ICP(Inductively Coupled Plasma) antenna and a plasma generating apparatus using the same are provided to generate a uniform high-density plasma and to reduce an internal inductance of the antenna segment. CONSTITUTION: An ICP antenna includes an internal antenna segment(21) and at least one external antenna segment(25). The internal antenna segment has a ring shape. The external antenna segment is implemented substantially at a concentric circle outside the internal antenna segment and is connected in series to the internal antenna segment. At least one of the internal and external antenna segments includes a plurality of circular coils(22,26,27), each of which has a radius different from those of the others. The circular coils are connected in parallel.