| 摘要 |
PURPOSE: Provided are a positive radiation-sensitive polymer composition capable of being developed with an alkaline solution, a thin film using the same, having high sensitivity, high resolution, excellent leveling, heat-resistance, anti-solvent property and transparency, and a device formed by using the thin film. CONSTITUTION: The positive radiation-sensitive polymer composition comprises a vinyl polymer having at least one of structural units represented by the formula 1, and 1,2-quinonediazide compound. In the formula 1, R1 is a single bond or an alkylene having carbon atoms of 1 to 3, R2 is hydrogen, methyl or chlorine, R3 is hydrogen or an alkyl having carbon atoms of 1 to 3, X is -COO-, -OCO-, -O- or -S-, A is oxetane group represented by the formula (a) or (b), wherein R4 and R5 are independently single bond or an alkylene having carbon atoms of 1 to 3, and R6-R15 are independently hydrogen or an alkyl having carbon atoms of 1 to 3. The thin film for the manufacture of a device is formed of the positive radiation-sensitive polymer composition.
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