Optical quality control of the edges of at least partially transparent objects with circular edges, especially semiconductor wafers, whereby reflected, refracted or scattered light from the object surface is captured and evaluated

摘要

Method for optical quality control of at least partially transparent objects, especially objects with circular edges, whereby light is directed onto the edge of the object and light reflected, refracted or scattered from the surface is detected by a measurement device (1). The image signal is used to detect defects on or in the object surface. An independent claim is also included for a corresponding measurement device for implementation of the inventive method.