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发明名称
Kontrollsystem für zweistufige Vakuumpumpe
摘要
申请公布号
DE69630981(T2)
申请公布日期
2004.12.30
申请号
DE19966030981T
申请日期
1996.02.28
申请人
ANEST IWATA CORP., TOKIO/TOKYO
发明人
HAGA, SHUJI;TSUCHIYA, MASARU
分类号
F04C18/02;F04C23/00;F04C28/02;F04C28/08;(IPC1-7):F04C23/00;F04C29/10
主分类号
F04C18/02
代理机构
代理人
主权项
地址
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