Apparatus for optical proximity correction, method for optical proximity correction, and computer program product for optical proximity correction

摘要

An apparatus for optical proximity correction according to an embodiment of the present invention has a data collector configured to collect source data of a circuit pattern, an edge line detector configured to detect edge lines each of which has a size that is less than a line width of the electrical circuit pattern, an edge line modifier configured to modify each of the edge lines so as to prevent an excess optical proximity correction, and a data synthesizer configured to generate pre-correction data from the modified edge lines and the source data.