| 摘要 |
The present invention relates to a method of enlarging a travel of a piezoelectric sensor and a MEMS switch employing an enlarging means employing the leverage theory. In accordance with the present invention, there is provided a MEMS switch capable of using a relatively low voltage, less than 5V, lowering power consumption isolation and insertion loss, and having application to a wide range of wireless communication systems such as PCS and wireless LAN. |
