发明名称 |
Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer |
摘要 |
An optical bench on which an optical component is mounted comprises an Si substrate made of a silicon wafer, a groove disposed on the Si substrate and designed to mount the optical component thereon, and a metal thin-film wiring for driving the optical component or a driver component. The metal thin-film wiring is formed in an electroless plating process before a groove manufacturing process which forms the groove by micromachining by means of wet processing.
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申请公布号 |
US2004266093(A1) |
申请公布日期 |
2004.12.30 |
申请号 |
US20040863339 |
申请日期 |
2004.06.09 |
申请人 |
FUKAO RYUZOU;SANBEI TETSUHIKO |
发明人 |
FUKAO RYUZOU;SANBEI TETSUHIKO |
分类号 |
B81C1/00;G02B6/36;(IPC1-7):H01L21/823 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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