| 摘要 |
A reference value E0, which defines electric power to be supplied to a heating element 32, is generated. Deviation DeltaT of temperature T1 measured by a radiation thermometer 4 from target temperature T0 defined by a target temperature rising curve M is determined. Compensation value E1 is determined based on the deviation DeltaT and the temperature T1. The reference value E0 is multiplied by the compensation value E1. The heating element is supplied with electric power according to the corrected reference value E1E0.
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