Calibration of reconfigurable inspection machine

摘要

A method for calibrating an inspection machine including a plurality of displacement detectors for inspecting a production part and a linear motion stage for relative motion between the displacement detectors and the production part. The method includes determining relative positional errors of the displacement detectors relative to each other, determining the effect of motion stage errors on a first detector from the plurality of displacement detectors as a function of position of the motion stage, and determining the effect of motion stage errors on the remaining displacement detectors as a function of position of the motion stage.