发明名称 Light irradiation type thermal processing apparatus and method of adjusting light irradiation intensity
摘要 A magnetic ring of ferromagnetic is attached to a wire for supplying electric power to a flash lamp. The magnetic ring is removable and is easily attachable to and detachable from the wire. When turning on the flash lamp, a high electrical current momentarily flows through the wire and intense magnetic fields occur around the wire, so that the magnetic ring attached around the wire is momentarily magnetized. As the result, induced electromotive force is generated and the current momentarily flowing through the wire is weakened, so that the irradiation intensity of the flash lamp is slightly lowered. In contrast, if desired to slightly increase the irradiation intensity of the flash lamp, the magnetic ring may be detached from the wire.
申请公布号 US2004264950(A1) 申请公布日期 2004.12.30
申请号 US20040850632 申请日期 2004.05.20
申请人 DAINIPPON SCREEN MFG., CO., LTD. 发明人 KUSUDA TATSUFUMI
分类号 H01L21/26;H01L21/00;(IPC1-7):F26B3/30;A21B2/00 主分类号 H01L21/26
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