| 摘要 |
A laser material processing apparatus for processing a workpiece (22) in such a way as to separate one laser light (26) into two laser beams (26a, 26b) via first polarizing means (25), one laser beam being passed via the mirrors (24), the other laser beam being scanned biaxially by a first galvano scanner (29), and conduct two laser beams (26a, 26b) to second polarizing means (27) for scanning via a second galvano scanner (30), wherein an optical path is constituted such that the laser beam (26b) transmitted through the first polarizing means (25) is reflected by the second polarizing means (27), and the laser beam (26a) reflected by the first polarizing means (25) is transmitted through the second polarizing means (27). |
