发明名称 Under bump metallization structure of a semiconductor wafer
摘要 An under bump metallurgy structure is applicable to be disposed above the wafer and on the bonding pads of the wafer. The wafer comprises a passivation layer and an under bump metallurgy structure. The passivation layer exposes the wafer pads, and the under bump metallurgy structure including an adhesive layer, a first barrier layer, a wetting layer and a second barrier layer are sequentially formed on the bonding pads. Specifically, the material of the second barrier mainly includes lead.
申请公布号 US2004262755(A1) 申请公布日期 2004.12.30
申请号 US20040820829 申请日期 2004.04.09
申请人 ADVANCED SEMICONDUCTOR ENGINEERING, INC. 发明人 HUANG MIN-LUNG
分类号 H01L21/60;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L21/60
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