发明名称 Photoresist polymer and photoresist composition containing the same
摘要 Photoresist polymers and photoresist compositions are disclosed. A photoresist polymer represented by Formula 1 and a photoresist composition containing the same have excellent etching resistance, thermal resistance and adhesive property, and high affinity to an developing solution, thereby improving LER (line edge roughness). wherein X1, X2, R1, R2, m, n, a, b and c are as defined in the description.
申请公布号 US2004265735(A1) 申请公布日期 2004.12.30
申请号 US20030718959 申请日期 2003.11.21
申请人 LEE GEUN SU 发明人 LEE GEUN SU
分类号 G03F7/004;G03F7/039;(IPC1-7):G03C1/76 主分类号 G03F7/004
代理机构 代理人
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