Clean room transportation package for process chamber kit

摘要

A clean room transportation package is useful to transport a process chamber kit having a number of chamber components having different shapes. The package comprises a first rigid tray having a first edge having a first rim and a plurality of first troughs extending outwardly from the first ledge that is detachably assembled to a second rigid tray having a plurality of second troughs extending outwardly from the second ledge. The second tray has a second rim that couples with the first rim of the first tray to form a seal therebetween. A plurality of conformal cells having different internal surface profiles are formed by the facing pairs of first and second troughs such that each conformal cell has an internal surface profile that is conformal to an external surface profile of one of the different chamber components of the kit so that movement of the chamber component in its conformal cell is minimized during transportation. A state of each chamber component of the process chamber kit may also be observed through a substantially transparent portion of a tray.