Method for producing stamper for optical information recording medium

摘要

Production of stamper with a concavo-convex pattern for an optical information recording medium, comprises producing a master having a concavo-convex pattern; forming an organic layer on the concavo-convex pattern of the master; forming a conductive film on the organic layer; forming a metal layer on the conductive film; and peeling off the metal layer alone or the metal layer together with the conductive film from the master. Production of stamper with a concavo-convex pattern for an optical information recording medium, comprises producing a master having a concavo-convex pattern by exposing and developing a master substrate, which comprises a substrate and a resist containing an inorganic material; forming an organic layer on the concavo-convex pattern of the master; forming a conductive film on the organic layer; forming a metal layer on the conductive film; and peeling off the metal layer alone or the metal layer together with the conductive film from the master.