method of fabricating multipole lens

摘要

The lens has a polar unit (23) made up of a support rod and a polepiece. The rod has held portions inserted in throughholes in a holding unit. An annular yoke disposed outside the holding unit is magnetically coupled to base-end portions of the polar units. The support rod and polepiece formed integrally are passed through throughholes in the holding unit. The yoke has openings to receive base-end portions of the polar units : Independent claims are also included for the following: (a) a charged-particle beam instrument fitted with multipole lenses; and (b) a method of fabricating a multiple lens.