PROBE CARD HAVING SPACE TRANSFORMER HAVING REMOVABLY INSERTED CONNECTING PIN

摘要

PURPOSE: A probe card is provided to prevent the occurrence of electrical conduction failure between electrodes and achieve high electrical contact and high reliability. improve a reliability of the probe card and to facilitate a locating operation of a defect portion thereby enabling an easy maintenance. CONSTITUTION: A probe card measures electrical properties of a measuring object and includes a main substrate(1), a sub-substrate(3), and a space transformer(2). The main substrate includes a first connecting electrode contacting measuring equipment. The sub-substrate is coupled to the main substrate and includes a plurality of through-holes(9) electrically conducting with the first connecting electrode. The space transformer includes a connecting pin removably inserted through the through hole on one main surface, and a plurality of contacts electrically conducting with the connecting pin and contacting the measuring object on the other main surface.