发明名称 Method of manufacturing transparent conducting structures and use of transparent conducting oxide layers to pattern transparent conducting regions
摘要 Production of an electrical and optical structure on a substrate comprises using a laser beam. Preferred Features: The substrate is made of indium-tin oxide layer system built up from InO and SnO layers or InO and Sn layers. The conducting pathway formed from the layer system is reinforced by applying a metal. The laser is Nd:YAG laser. The substrate is etched after being subjected to the laser beam.
申请公布号 EP1124264(A3) 申请公布日期 2004.12.29
申请号 EP20010102970 申请日期 2001.02.08
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWANDTEN FORSCHUNG E.V. 发明人 KLAGES, CLAUS-PETER DR.;NEUMANN, FRANK;MATTHEE, THORSTEN DR.;SZYSZKA, BERND DR.
分类号 B23K26/40;H01L21/268;H05K3/02;H05K3/10 主分类号 B23K26/40
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