发明名称 |
Method of manufacturing transparent conducting structures and use of transparent conducting oxide layers to pattern transparent conducting regions |
摘要 |
Production of an electrical and optical structure on a substrate comprises using a laser beam. Preferred Features: The substrate is made of indium-tin oxide layer system built up from InO and SnO layers or InO and Sn layers. The conducting pathway formed from the layer system is reinforced by applying a metal. The laser is Nd:YAG laser. The substrate is etched after being subjected to the laser beam. |
申请公布号 |
EP1124264(A3) |
申请公布日期 |
2004.12.29 |
申请号 |
EP20010102970 |
申请日期 |
2001.02.08 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWANDTEN FORSCHUNG E.V. |
发明人 |
KLAGES, CLAUS-PETER DR.;NEUMANN, FRANK;MATTHEE, THORSTEN DR.;SZYSZKA, BERND DR. |
分类号 |
B23K26/40;H01L21/268;H05K3/02;H05K3/10 |
主分类号 |
B23K26/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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