METHOD AND APPARATUS FOR INCREASING BULK CONDUCTIVITY OF A FERROELECTRIC MATERIAL

摘要

In one embodiment, a method of processing a ferroelectric material comprises enclosing the ferroelectric material and a metal source in a container (1002), ramping up the temperature of the container (1016), heating the container for a target amount of time at a temperature below a Curie temperature of the ferroelectric material (1020), and then ramping down the temperature of the container (1022). The target amount of time may be set to obtain a target conductivity. For example, the target amount of time may be about 25 hours or less.