METHOD AND EQUIPMENT FOR INSPECTING ELECTRIC CHARACTERISTICS OF SPECIMEN

摘要

A method and equipment for inspecting the electric characteristics of a specimen W in which the electrode of the specimen W and a probe (12A) are brought into contact reliably and stably with a constant overdrive amount at all times. The method and equipment is characterized in that the height of a load detecting mechanism (17) is measured using a length measuring mechanism (16), a first lift of the load detecting mechanism (17) from the measuring position thereof to a point to start contact with the probe (12A) is determined, the height of the electrode of the specimen W is measured using the length measuring mechanism (16), and a second lift of a main chuck (11) up to the point to start contact with the probe (12A) is determined based on the difference in the measured height between the electrode of the specimen W and the load detecting mechanism (17).