UNIFORMITY RING OF DRY ETCHING DEVICE HAVING HOLES FOR EMITTING ETCHING RESIDUES

摘要

PURPOSE: A uniformity ring of a dry etching device is provided to emit an etching residue formed in the uniformity ring during an etching process by using a hole formed on the uniformity ring. CONSTITUTION: A uniformity ring(6) of a dry etching device includes a guide portion(6a), and a bottom portion(6b). The guide portion forms vertical sidewalls of the uniformity ring. The bottom portion cuts a bottom portion of the guide portion horizontally. A hole(9) is formed on a portion of the guide portion. The hole on a portion of the guide portion exhausts an etching residue generated in an etching through a pumping line.