Calibration method for a lithographic apparatus

摘要

The method involves calculating a calibration that establishes a relationship between coordinates of a coordinate system of a programmable mirror array (PPM) and coordinates of the coordinate system of a substrate table. The calibration is calculated based on detected radiation intensity and positions of the array of individually controllable units and the substrate table. Independent claims are also included for the following: (a) a lithographic apparatus manufacturing method (b) a computer program for controlling a lithographic apparatus, comprising code unit for performing a calibration method.