Coil for plasma generating source

摘要

The coil has a unit coil structured such that an interval between portions of the unit coil in x direction decreases as a radial distance from a center of a coil bushing (210) increases in the x direction. The interval increases as the radial distance decreases. An interval between currents flowing through the coil becomes narrower as the coil extends farther from the center of the coil bushing in a radial direction. An independent claim is also included for a plasma chamber comprising a plasma source coil.