Semiconductor acceleration sensor and method of manufacturing the same

摘要

The sensor has a rectangular frame (2) with damper plate portions (6) that covers a part of an opening (21) and serves as a stopper to limit movement of a weight. The weight has corner portions (53) that face respective corner portions (22) of the frame, and is chamfered to have a shape of arc or a polygonal line. The part spans from the corner portion of two neighboring sides of the frame to inside of the opening. An independent claim is also included for a method of manufacturing a semiconductor acceleration sensor.