发明名称 SURFACE ACOUSTIC WAVE DEVICE
摘要 <p>A surface acoustic wave device which uses an interdigital electrode mainly containing Cu and is significantly improved in power resistance. The surface acoustic wave device (1) comprises a piezoelectric substrate (2), and an interdigital electrode (3) formed on the piezoelectric substrate (2), wherein the interdigital electrode (3) has a main electrode layer (3a) consisting of Cu or an alloy mainly containing Cu, and a close-contact layer (3b) disposed between the main electrode layer (3a) and the piezoelectric substrate (2) and mainly containing NiCr, or a close-contact layer (3b) mainly containting Ti and having a film thickness of 18-60 nm.</p>
申请公布号 WO2004114521(A1) 申请公布日期 2004.12.29
申请号 WO2004JP04896 申请日期 2004.04.05
申请人 MURATA MANUFACTURING CO., LTD.;HADA, TAKUO;NAKAO, TAKESHI;KADOTA, MICHIO;NAKAGAWARA, OSAMU 发明人 HADA, TAKUO;NAKAO, TAKESHI;KADOTA, MICHIO;NAKAGAWARA, OSAMU
分类号 H03H9/02;H03H9/145;H03H9/25;H03H9/64;(IPC1-7):H03H9/145 主分类号 H03H9/02
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